Micro LED, typically defined as LEDs with sizes below 100 μm, offers several advantages over traditional LEDs and OLEDs, including longer lifespans, higher resolution and contrast, better brightness, richer colors, and lower power consumption. However, due to their extremely small size, there are still numerous technical challenges in scaling up the production of Micro LEDs.
Currently, Micro LEDs come in various sizes, such as a height of ≤ 10 μm and dimensions of 34×58 μm, 20×40 μm, and 15×25 μm. The ultra-small size and high density of Micro LEDs make the mass transfer process and the subsequent defect detection and repair critical for achieving high yield rates.
Defect detection in Micro LEDs primarily relies on 2D vision systems. However, there is an increasing demand for 3D inspection to measure the coplanarity of Micro LED heights. PRECITEC‘s high-precision 3D line spectroscopy technology offers a stable and efficient solution for 3D inspection of Micro LEDs.
Line Sensor CLS 2 Pro
The CHRocodile CLS 2 spectral confocal line sensor is the ideal tool for precise 3D inline quality control in harsh industrial environments. With a fast scan rate of up to 36,000 profiles per second, it can quickly determine the 3D structure of a sample, making it particularly suitable for applications with critical cycle times.
The spectral confocal measurement technology provides data with extremely high lateral and axial resolution, ensuring accurate measurement of all types of materials without shadow effects, even for complex geometries.
Additionally, the easily replaceable optical probes provide high flexibility, allowing the sensor’s specifications to be tailored to meet specific requirements.
Applications of the CLS 2 Series:
Semiconductor Industry:
- Wire bonding inspection
- Bump measurement
- Packaging wafer edge inspection
- Groove inspection
- Defect detection
- Die cracks
- Photomask lithography
Consumer Electronics:
- Shell surface inspection
- Inspection of slightly, moderately, and heavily curved surfaces
- Chamfer and corner inspection
- Diameter/hole/trapezoidal surface inspection
- Appearance inspection of objects with special heights
About PRECITEC
Founded in 1971 in Baden-Baden, Germany, PRECITEC has been at the forefront of laser material processing technology. With subsidiaries and representative offices in 22 countries worldwide, the company operates globally, specializing in laser and 3D measurement technologies.
PRECITEC Laser Cutting:
PRECITEC‘s cutting heads are known for their high efficiency, flexibility, and ease of use, making them suitable for various laser types, such as CO2, disc, and fiber lasers. The integrated sensors in the cutting heads ensure a coordinated process and excellent cutting quality.
PRECITEC Laser Welding:
PRECITEC not only provides welding heads but also a complete set of automated welding quality monitoring systems. Through sensors and actuators, monitoring and control are carried out before, during, and after welding, offering an advanced one-stop solution for welding tasks.
PRECITEC Optical Measurement:
PRECITEC is a highly innovative manufacturer of sensors and optical probes in Germany. Its product range includes spectral confocal, interferometric, point, line, and multi-point sensors, as well as area scanning sensors and spectral line scan cameras. The company serves various industries such as consumer electronics, semiconductors, glass, automotive, and medical fields, continuously pushing the limits of precision in online measurements and exploring new possibilities for offline inspections.
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