On June 3, Evatec announced the launch of several film deposition equipment solutions aimed at improving the production yield of Micro LED chips.
Company Overview
Evatec is a Swiss semiconductor equipment manufacturer specializing in film deposition technology, widely used in advanced packaging, semiconductors, optoelectronics, and optics. Their technology plays a critical role in the development of modern technologies such as IoT, 5G communication, energy-efficient electronics, automotive LED lighting, and facial recognition on smartphones. Evatec offers clients comprehensive film process solutions from R&D to mass production.
Distinct Manufacturing Challenges
Evatec highlights that the manufacturing process for Micro LED chips differs significantly from traditional LEDs in several aspects, necessitating higher technical requirements and more precise process control.
For instance, Micro LED chips typically measure less than 100μm, which demands greater fabrication precision and finer manufacturing techniques, including thinner layer growth, deposition control, and enhanced system stability, along with stringent granularity control.
Defect Repair Challenges
Due to the minuscule size of Micro LEDs, their defect repairability is almost nonexistent, which underscores the need for a higher yield during production.
Evatec emphasizes that the chip manufacturing requirements for Micro LEDs are markedly different from those for traditional LEDs, and the prioritization of critical control parameters in Micro LED manufacturing has also shifted.
Innovative Film Deposition Solutions
To improve Micro LED production yield, Evatec has introduced several film deposition solutions specifically designed for Micro LED chip manufacturing. These solutions utilize semiconductor-grade coating equipment and are compatible with 4, 6, and 8-inch wafer coatings, implementing cassette-to-cassette and SMIF standards.
Evatec Clusterline® 200E
The Evatec Clusterline® 200E is a cluster-type sputtering deposition system that supports the deposition of metals like WTi, Ni, and Ag. The equipment features Evatec’s patented FTC technology, enabling damage-free deposition of ITO films on GaN while maintaining optimal particle control and excellent deposition uniformity. This device has already received certification from key clients.
Evatec Clusterline® BPME
The Evatec Clusterline® BPME is a batch-type sputtering deposition system that facilitates low-damage ITO sputtering, allowing for the deposition of high-covering DBR reflective films for Micro LEDs while ensuring the best possible particle levels. Additionally, the Hybrid DBR developed by Evatec for Micro LED applications significantly reduces the thickness of traditional DBRs, providing crucial support for Micro LED fabrication.
Evatec BAK941
The Evatec BAK941 is a fully automated (cassette-to-cassette) batch evaporation deposition solution tailored for metal evaporation Lift-off processes. This system eliminates human uncertainties by maintaining vacuum in the process chamber, and the high-vacuum environment enhances particle control and film density.
Disclaimer: The views and opinions expressed in this article are those of the original authors and do not necessarily reflect the official policy or position of MiniMicroLED Insights . While we strive to ensure the accuracy and reliability of the information provided, the content on this website may include translations, re-edited versions of second-hand information, or information derived from unverifiable sources. MiniMicroLED Insights makes no representations or warranties, express or implied, regarding the completeness, accuracy, or timeliness of such content. The information in this article is for informational purposes only and should not be construed as professional advice. Any reliance you place on such information is strictly at your own risk. To the fullest extent permitted by law, MiniMicroLED Insights disclaims all liability for any direct, indirect, incidental, consequential, or punitive damages arising out of your use of, or reliance on, the information contained in this article.
Copyright Notice: This article may include translated and re-edited content derived from various online sources, including websites and social media platforms. While we strive to credit the original authors and sources to the best of our ability, we may not always be able to verify the original source of the content. All rights to the original content remain with the original author or source publication. Where applicable, this content is reproduced for educational and informational purposes under the fair use doctrine. If you believe any content on this site infringes upon your intellectual property rights, or if you are the copyright owner and believe we have not credited you correctly, please contact us at minimicroled.business@gmail.com. We will investigate and take corrective action, including removing or properly crediting the content if necessary.
Content sourced and adapted by MiniMicroLED Insights (Doris).