Yibo Liu4,1, Feng Feng1, Ke Zhang1,2, Fulong Jiang2, Ka-Wah Chan1,3, Hoi-Sing Kwok1 and Zhaojun Liu4,2,3
Published 24 May 2022 • © 2022 IOP Publishing Ltd
Journal of Physics D: Applied Physics, Volume 55, Number 31Citation Yibo Liu et al 2022 J. Phys. D: Appl. Phys. 55 315107DOI 10.1088/1361-6463/ac6cb4
Author e-mails
Author affiliations
1 Department of Electrical and Computer Engineering, Hong Kong University of Science and Technology, Hong Kong SAR, People’s Republic of China
2 Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen 518055, People’s Republic of China
3 Shenzhen Sitan Technology Co., Ltd., Shenzhen, People’s Republic of China
Author notes
4 Author to whom any correspondence should be addressed.
ORCID iDs
Yibo Liu https://orcid.org/0000-0002-3474-3908
Feng Feng https://orcid.org/0000-0003-0020-4129
Zhaojun Liu https://orcid.org/0000-0002-7746-2786
Dates
- Received 5 February 2022
- Accepted 4 May 2022
- Published 24 May 2022
Abstract
In this paper, the GaN-based green micro light-emitting diodes (Micro-LEDs) with various sizes (from 3 to 100 μm) were fabricated and electro-optically characterized. Atom layer deposition (ALD) passivation and potassium hydroxide (KOH) treatment were applied to eliminate the sidewall damage. The size dependence of Micro-LED was systematically analyzed with the current-versus-voltage and current density-versus-voltage relationship. According to the favorable ideality factor results (<1.5), the optimized sidewall treatment was achieved when the device size shrank down to <10 μm. In addition, the external quantum efficiency (EQE) droop phenomenon, luminance and output power density characteristics were depicted up to the highest current density injection condition to date (120 kA cm−2), and 6 μm device exhibited an improved EQE performance with the peak EQE value of 16.59% at 20 A cm−2 and over 600k and 6M cd cm−2 at 1 and 10 A cm−2, indicating a greater brightness quality for over 3000 PPI multiple display application. Lastly, the blue shift of the 6 μm device with elevating current density was observed in electroluminescence spectra and converted to CIE 1931 color space. The whole shifting track and color variation from 1 A cm−2 to 120 kA cm−2 were demonstrated by color coordinates.
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